Physics and technology of optics and microelectronics + SB

This module is devoted to the physical understanding of the processes of light emission and absorption in semiconductor devices, and to the technologies used to manufacture such devices. These issues are concretized in the clean room project, with the realization and characterization of an opto-electronic component.

- Master the concepts and theories of the physics of optoelectronic semiconductor components

- Master the elaboration of materials and components through the implementation of different technological steps, as well as their modeling

- Implement experimental techniques for clean room manufacturing and characterization; work in a clean room environment (safety, constraints, etc.).

Condensed Matter Physics; Component Physics and Technology (HAP711P)

Recommended Prerequisites:

Quantum mechanics; Statistical physics

Continuous control

1) Physics of opto-electronic semiconductor components:

- Light emitters and receivers: what are the issues?

- Optical properties of semiconductors

- Quantum confinement in heterostructures

- Photonics for optoelectronics

- Opto-electronic components :

- LED, laser diodes, amplifiers, modulators

- Sensors

- Focus: VCSEL III-V technology

2) Material and component development (Technology 2/3)

- Growth of materials: principles, mechanisms and techniques

- Physical mechanisms common to all growth techniques

- Solid material growth and shaping, from ingot to wafer

- Thin films (epitaxial or polycrystalline): from a gas phase, assisted or not by plasma (CVD...), sputtering, evaporation, growth under high vacuum (sputtering, magnetron, RF - thermal evaporation or under electron beam)

- In-situ doping

- Other technological processes:

- state of the art in lithography (optical, electronic, extreme UV...) and etching (dry and wet)

- thermal oxidation (Deal-Grove and Massoud models)

- grinding (thinning), planarization (CMP)

3) Project in clean room : Realization of optoelectronic components + optical characterization