Sensor Design Technology

This teaching unit, dedicated to sensor manufacturing methods, is structured around a technological project, carried out in pairs, whose progress will follow the progression of the associated courses.

Each project topic will be assigned at the beginning of the teaching unit.

The proposed projects will focus on the fabrication and characterization of elementary microsystems. The main fabrication and characterization techniques will be presented in lectures, and practical work will be carried out as the project progresses.

- Transmit theoretical knowledge through the construction of a sensor over the period of the teaching unit.

- Teach the student to work independently on a defined subject in a finite time.

- Present the results of your work in written and/or oral form.

None.

Recommended prerequisites* :

Basic knowledge of physics.

Basic knowledge of electronics.

The members of the pair will be assessed on their project (theory and practice). The pair will provide a report on the proposed topic, and may be invited to give an oral presentation of their work.

Two objectives will be defined at the beginning of the teaching unit in relation to the specifications defining the project:

• A goal to reach
• A minimum target for EU validation

Session 2 will be based on written (or oral) and/or practical work.

• Cleanroom microelectronics manufacturing techniques :

• Lithography
• Metal deposits
• Chemical attacks
  • Associated characterization techniques :

In general, the following aspects of characterization methods are covered

• Physical principle of operation
• Measured variable(s)
• Characterized quantity(ies)
• Instrumental implementation
• Horizontal and vertical resolutions where applicable
• Qualitative and/or quantitative measurements
• Specificity (nature of materials or surfaces characterized, etc.)
• Analysis of supplied signals

1) Light microscopy: all colors or the basic technique

2) Electron microscopy: from photon to electron, or how to increase resolution

3) Mechanical and optical profilometry: topography metrology

4) Atomic force microscopy: topography and mechanical characteristics

5) I(V) measurements

• Functional characterization :

" It's a beautiful sensor, but what does it need to be functional?

Establish sensor response or calibration

Do I need a conditioner?

Should the output signal be processed?

Adaptation of measurement chain components

What to do with the data: signal acquisition

CM: 21h

Practical work: 21h