Sensor Design Technology

This teaching unit, devoted to the methods of manufacturing sensors, is structured around a technological project, conducted in pairs, whose progress will follow the progression of the associated courses.

Each project topic will be assigned at the beginning of the course

The proposed projects will focus on the fabrication and characterization of elementary microsystems. The main fabrication and characterization techniques will be presented through lectures and practical work will allow the project to progress.

- To transmit theoretical knowledge through the construction of a sensor over the period of the teaching unit.

- To teach the student to work independently on a defined topic in a finite amount of time.

- Present the results of their work in written and/or oral form.

None.

Recommended prerequisites*:

Have a basic knowledge of physics.

Have a basic knowledge of electronics.

The members of the pair will be evaluated on their project (theory and practice). The pair will provide a report on the proposed topic and may be asked to present their work orally.

Two objectives will be defined at the beginning of the teaching unit in relation to the specifications defining the project:

• A goal to achieve
• A minimum objective for EU validation

A session 2 will be organized on a written (or oral) and/or practical basis

• Cleanroom microelectronics manufacturing techniques:

• Lithography
• Metal deposits
• Chemical attacks
  • Associated characterization techniques:

In general, the following aspects of characterization methods are addressed

• Physical principle of operation
• Measured variable(s)
• Characterized quantity(ies)
• Instrumental implementation
• If applicable, horizontal and vertical resolutions
• Qualitative and/or quantitative measures
• Specificity (nature of the materials or characterized surface...)
• Analysis of the signals provided

1) Light microscopy: of all colors or the basic technique

2) Electron microscopy: from photon to electron or how to increase the resolution

3) Mechanical and optical profilometry: metrology of topography

4) Atomic force microscopy: topography and mechanical characteristics

5) I(V) measurements

• Functional characterization:

" It's a nice sensor, but what does it need to be functional?"

Establish sensor response or calibration

Is a conditioner needed?

Is it necessary to process the output signal?

Adaptation of the measurement chain elements

What to do with the data: signal acquisition

CM : 21h

TP : 21h