Sensor Design Technology

This course, which focuses on sensor manufacturing methods, is structured around a technology project carried out in pairs, the progress of which will follow the progression of the associated classes.

Each project topic will be assigned at the beginning of the course

The proposed projects will focus on the fabrication and characterization of basic microsystems. The main fabrication and characterization techniques will be presented through lectures, and lab sessions will facilitate the project’s progress.

- To impart theoretical knowledge through the construction of a sensor during the course unit.

- Teach students to work independently on a specific topic within a set time frame.

- Present the well-reasoned results of one's work in written and/or oral form.

None.

Recommended prerequisites*:

Have a basic understanding of physics.

Have a basic understanding of electronics.

The members of each pair will be evaluated on their project (theory and practice). Each pair will submit a report on the proposed topic and may be asked to present their work in an oral exam.

Two objectives will be established at the beginning of the course unit based on the project specifications:

• A Goal to Achieve
• A minimum target for EU approval

Session 2 will consist of a written (or oral) exam and/or be based on practical assignments.

• Cleanroom Microelectronics Manufacturing Techniques:

• Lithography
• Metal Deposits
• Chemical attacks
  • Related characterization techniques:

In general, the following aspects of characterization methods are discussed

• Physical Principle of Operation
• Measured quantity(ies)
• Characterized quantity(ies)
• Instrumental Implementation
• If applicable, horizontal and vertical resolutions
• Qualitative and/or quantitative measures
• Specific characteristics (nature of the materials or surfaces being characterized, etc.)
• Analysis of the Provided Signals

1) Optical microscopy: all colors, or the basic technique

2) Electron microscopy: from photons to electrons, or how to increase resolution

3) Mechanical and optical profilometry: topographic metrology

4) Atomic force microscopy: topography and mechanical properties

5) I(V) Measurements

• Functional characterization:

"This sensor looks great, but what does it need to work?"

Determine the sensor's response or calibrate it

Do you need conditioner?

Should the output signal be processed?

Adjustment of Measurement Chain Components

What Do We Do with the Data: Signal Acquisition

CM: 9:00 p.m.

TP: 9:00 p.m.