Sensor Design Technology

This teaching unit, devoted to sensor manufacturing methods, is structured around a technology project, carried out in pairs, the progress of which will follow the progression of the associated courses.

Each project topic will be assigned at the beginning of the teaching unit.

The proposed projects will focus on the manufacture and characterization of elementary microsystems. The main manufacturing and characterization techniques will be presented through lectures and practical work will enable the project to progress.

- Transmit theoretical knowledge through the construction of a sensor during the teaching unit.

- Teach students to work independently on a specific topic within a set time frame.

- Present the results of your work in a written and/or oral format, supported by arguments.

None.

Recommended prerequisites:

Have a basic understanding of physics.

Have a basic understanding of electronics.

The members of the pair will be assessed on their project (theory and practice). The pair will submit a report on the proposed topic and may be asked to give an oral presentation of their work.

Two objectives will be defined at the beginning of the teaching unit in relation to the specifications defining the project:

• A goal to achieve
• A minimum target for EU validation

A second session will be organized based on a written (or oral) exam and/or practical work.

• Cleanroom microelectronics manufacturing techniques:

• Lithography
• Metal deposits
• Chemical attacks
  • Related characterization techniques:

In general, the following aspects of characterization methods are addressed

• Physical operating principle
• Measured quantity(ies)
• Characterized quantity(ies)
• Instrumental implementation
• If applicable, horizontal and vertical resolutions
• Qualitative and/or quantitative measures
• Specificity (nature of materials or surface characteristics, etc.)
• Analysis of the signals provided

1) Optical microscopy: all colors or the basic technique

2) Electron microscopy: from photons to electrons, or how to increase resolution

3) Mechanical and optical profilometry: topography metrology

4) Atomic force microscopy: topography and mechanical characteristics

5) I(V) measurements

• Functional characterization:

"This sensor is beautiful, but what does it need to be functional?"

Establish the sensor response or calibrate it

Is a conditioner necessary?

Should the output signal be processed?

Adaptation of measurement chain components

What to do with the data: signal acquisition

CM: 9 p.m.

Practical work: 9 p.m.